Polarization Measurement Method Based on Liquid Crystal Variable Retarder (LCVR) for Atomic Thin-Film Thickness

Abstract Atomic thickness thin films are critical functional materials and structures in atomic close-to-atomic scale manufacturing. However, fast, facile, highly sensitive precision measurement of film remains challenging. The reflected light has a dramatic phase change extreme reflectivity considering the Brewster angle, indicating high sensitivity optical signal to near this angle. Hence, polarization method focusing on angle is vital for ultrahigh characterization films. A based liquid crystal variable retarder (LCVR) proposed paper, system with angular resolution established. comprehensive calibration scheme also introduced accommodate measurement. Repeatable accuracy subnanometer level achieved. Standard silicon oxide samples different thicknesses were measured around using self-developed compared commercial ellipsometer verify accuracy. consistency results demonstrates feasibility robustness scheme. This study remarkable potential LCVR-based ultraprecision